L3-x00

Overview

3-Stage Linear Head Transfer machine transfers wafers between two 25-slot carriers and one 50 slot process carrier.

Features & Benefits

Senior/Junior(50/25) 3-stage Wafer Transfer Machine transfers 25/50 wafers from Plastic to Quartz, Plastic to Plastic and Quartz to Plastic.
Single PC controller computer controlled enhancing system performance and service.
With the push of a button, the machine transfers wafers safely and automatically.
Lift system uses ramped speed controls for gentle pick-up and landing.
Pressure sensors are used both for personal safety and machine safety by inhibiting machine operation.
Retainers default to closed position to prevent dropping wafers in the event of electrostatic discharge, loss of power
Brushless motors, clean room grade bearing, linear head movement
Electric reflective sensors are used to detect wafer presence in both retainers and carriers to prevent accidental double loading and scratches.

Options