ML2-x25T

Features and Benefits

Compact floor standing machine, no extra equipment necessary, i.e.: table or stand.
The MacLite Series two-stage machine, known as ML2, transfers wafers between one 25-slot carrier and one 25-slot process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon or metal.
Fast & Smooth, featuring ramped speeds and soft landing. A 25 wafer transfer is under 45 seconds.
Operator interface is with a 12 key keypad with a 4 line LCD display.
The ML2 stage will travel left and right for easy loading and unloading of carriers and boats.
MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
Clean operation introduces no more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
Single Board PC controlled.
Sensors detect wafer, cassette and process carrierpresence for safety.
Pressure sensors on the elevator and platform protects against wafer damage and ensures personnel safety.
Flat alignment is maintained during transfer.
Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
All exposed aluminum parts are hard Black Anodized.
Covers are powder covered aircraft grade aluminum.
Uptime will exceed 99.95%.
- MTBF (mean time between failure): 2,500 hours
- MTBA (mean time between assist): 1,000 hours
- MTTR (mean time to repair): 1 hour

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