R33-300

Standard Features

• A modular, expandable wafer handler in a Class 1 Mini-Environment
• Can incorporate 2 or more FOUP, FOSB or SMIF pods and standard cassette stations
• Safe clean edge grip end effector on Mactronix 3-axis robot arm for fast, smooth sorting and transfer functions
• Touch-screen, easy to use interface
• Includes notch-finding for accurate wafer orientation
• Single point low impedance grounding
• Anodized aluminum frame
• Powder coat epoxy covers
• Small footprint  

Specifications  

• Throughput > 250 wafer/hr
• Uptime > 99.5%
  • MTTA, 1 to 2 minutes
  • MTTR < 1 hour
  • MTTF > 2500 hours

Optional Features

• Full GEM/SECS interface
• Optional Earthquake Tie Down Points
• OCR reader System
• Anti-static bar under HEPA filter
• Mini-environment closure constructed with anti-static materials
• Barcode Tag Reader
• Stainless Steel Covers