R4-200/R4-300

Standard Features

  • A modular, expandable wafer handler in a Class 1 Mini-Environment
  • Can incorporate 2 to 4 FOUP, FOSB or SMIF pods and standard cassette stations
  • Safe clean end-effector on Mactronix robot arm for fast, smooth sorting and transfer functions
  • Touch-screen, easy to use interface
  • Wafer ID Reader (O.C.R.)  
  • Includes notch-finding for accurate wafer orientation
  • Anodized aluminum frame
  • Powder coat epoxy covers

SPECIFICATIONS  

  • Earthquake tie-down points
  • Throughput > 300 wafer/hr
  • Uptime > 99.5%
    • MTTA: SEMI standard 
    • MTTR: SEMI standard
    • MTTF: SEMI standard

Optional Features

  • Full GEM/SECS interface
  • Anti-static bar under HEPA filter
  • Mini-environment enclosure
  • Barcode Tag Reader
  • Stainless Steel Covers