RV1-x00

Standard Features

• A modular, expandable wafer handler in a Class 1 Mini-Environment

• Can incorporate 2 to 4 SMIF pods and standard cassette stations

• Safe clean end-effector on Mactronix robot arm for fast, smooth sorting and transfer functions

• Touch-screen, easy to use interface

• Wafer mapping, cross-slot detection  

• Enclosed transfer station (HEPA filter optional) 

• Anodized aluminum frame

• Powder coat epoxy covers

• Throughput > 750 wph (non-OCR) / 350 wph (OCR)

Uptime > 99.5%

MTTA: SEMI standard 

MTTR: SEMI standard

MTTF: SEMI standard

Optional Features

• Full GEM/SECS interface

• Anti-static bar under HEPA filter

• Mini-environment enclosure

• Barcode Tag Reader

• O.C.R. System

• Wafer aligner