BPCx25P5


Features & Benefits
• Horizon Back-to-Back Pitch Changer (BPC) Wafer Transfer Machine transfers 25 wafers in a back-to-back configuration between a 25-slot PB carrier and one 25 slot quartz boat.
• The machine may be configured to accommodate a large diversity of Plastic, Teflon®, metal, Quartz, Silicon Carbide and Polysilicon carriers.
• PLC controlled enhancing system simplicity.
• With the push of a button, the machine transfers wafers safely and automatically.
• The Horizon Series V machines are designed to limit particle contamination by using rodless cylinders, “clean room grade” rails and bearings and electrical boat sensors.
• The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
• Cassette and boat sensors located in the platform prevent the machine from operating if the required carriers are not present.
• All aluminum parts are hard black anodized for corrosion resistance.
• Electrical micro-switch sensors are used to detect retainer position to prevent accidental double loading and scratches.
• Lift system uses ramped speed controls for gentle pick-up and landing.
• Pressure sensors located in the lift system are used both for personal safety and machine safety by inhibiting machine operation.
• Retainers default to closed position to prevent dropping wafers in the event of electrostatic discharge, loss of power, or loss of air pressure.
• A pause function is provided to stop the lift system at any position to facilitate preventative maintenance and cleaning.
• Uptime will exceed 99.25%.
• MTBF (mean time between failure): 2,500 hours
• MTBA (mean time between assist): 1,000 hours
• MTTR (mean time to repair): less than 1 hour
Options
• RS232 communications port
• Recessed mounting
• Vespel package for high temperature applications
• Stainless steel covers.
• Hot boat sensor