Features & Benefits

  • The Horizon Senior Series V with junior function, transfers wafers between two 25-slot carriers and one 50-slot Quartz boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon and metal boats.
  • Application must use some 50 slot boat for both functions.
  • PLC controlled enhancing system simplicity.
  • With the push of a button, the machine transfers waferssafely and automatically.
  • The Horizon Series V machines are designed to limitparticle contamination by using rod-less cylinders, “clean room grade” rails and bearings and electrical boat sensors.
  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
  • All aluminum parts are hard black anodized for corrosion resistance.
  • Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
  • Lift system uses ramped speed controls for gentle pick- up and landing.
  • Pressure sensors are used both for personal safety and machine safety by inhibiting machine operation.
  • Retainers default to closed position to prevent dropping wafers in the event of electrostatic discharge, loss of power, or loss of air pressure.
  • A pause function is provided to stop the lift system at any position to facilitate preventative maintenance and cleaning.
  • The Series V machines have been tested with up to 50,000 volts electrostatic discharges without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.
  • Uptime will exceed 99.25%.
    • MTBF (mean time between failure): 2,500 hours • MTBA (mean time between assist): 1,000 hours • MTTR (mean time to repair): 1 hour


• RS232 communications port
• Recessed mounting
• Vespel package for high temperature applications • Stainless steel covers.
• Hot boat sensor