HZNx50P5

Features & Benefits

• The Horizon Senior Series V with junior function, transfers wafers between two 25-slot carriers and one 50-slot Quartz boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon and metal boats.
• Application must use some 50 slot boat for both functions.
• PLC controlled enhancing system simplicity.
• With the push of a button, the machine transfers waferssafely and automatically.
• The Horizon Series V machines are designed to limitparticle contamination by using rod-less cylinders, “clean room grade” rails and bearings and electrical boat sensors.
• The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
• All aluminum parts are hard black anodized for corrosion resistance.
• Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
• Lift system uses ramped speed controls for gentle pick- up and landing.
• Pressure sensors are used both for personal safety and machine safety by inhibiting machine operation.
• Retainers default to closed position to prevent dropping wafers in the event of electrostatic discharge, loss of power, or loss of air pressure.
• A pause function is provided to stop the lift system at any position to facilitate preventative maintenance and cleaning.
• The Series V machines have been tested with up to 50,000 volts electrostatic discharges without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.
• Uptime will exceed 99.25%.
  • MTBF (mean time between failure): 2,500 hours • MTBA (mean time between assist): 1,000 hours • MTTR (mean time to repair): 1 hour

Options

• RS232 communications port
• Recessed mounting
• Vespel package for high temperature applications • Stainless steel covers.
• Hot boat sensor