3-Stage Linear Head Transfer machine transfers wafers between two 25-slot carriers and one 50 slot process carrier.
Features & Benefits
- Senior/Junior(50/25) 3-stage Wafer Transfer Machine transfers 25/50 wafers from Plastic to Quartz, Plastic to Plastic and Quartz to Plastic.
- Single PC controller computer controlled enhancing system performance and service.
- With the push of a button, the machine transfers wafers safely and automatically.
- Lift system uses ramped speed controls for gentle pick-up and landing.
- Pressure sensors are used both for personal safety and machine safety by inhibiting machine operation.
- Retainers default to closed position to prevent dropping wafers in the event of electrostatic discharge, loss of power
- Brushless motors, clean room grade bearing, linear head movement
- Electric reflective sensors are used to detect wafer presence in both retainers and carriers to prevent accidental double loading and scratches.
- Light Tower
- SECS GEM II
- Touch screen
- High temperature vespel package
- Hot boat sensor