MCL-x50

Features and Benefits

The MacLite Senior Series with junior function, transfers wafers between two 25-slot carriers and one 50-slot process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon or metal.
Fast & Smooth, featuring ramped speeds and soft landing. A 50 wafer transfer is under one minute.
Operator interface is with a 12 key keypad with a 4 line LCD display. START/STOP butttons optional
MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
Single Board PC controlled.
Sensors detect wafers and cassette or process carrierpresence for safety.
Flat alignment is maintained during transfer.
Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
All exposed aluminum parts are hard Black Anodized.
Covers are powder covered aircraft grade aluminum.
Uptime will exceed 99.95%.
- MTBF (mean time between failure): 2,500 hours
- MTBA (mean time between assist): 1,000 hours
- MTTR (mean time to repair): 1 hour

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