Features and Benefits

  • The MacLite Senior Series with junior function, transfers wafers between two 25-slot carriers and one 50-slot process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon or metal.
  • Fast & Smooth, featuring ramped speeds and soft landing. A 50 wafer transfer is under one minute.
  • Operator interface is with a 12 key keypad with a 4 line LCD display. START/STOP butttons optional
  • MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
  • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
  • Single Board PC controlled.
  • Sensors detect wafers and cassette or process carrierpresence for safety.
  • Flat alignment is maintained during transfer.
  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
  • All exposed aluminum parts are hard Black Anodized.
  • Covers are powder covered aircraft grade aluminum.
  • Uptime will exceed 99.95%.
    • MTBF (mean time between failure): 2,500 hours 
    • MTBA (mean time between assist): 1,000 hours 
    • MTTR (mean time to repair): 1 hour


  • Vespel package for high temperature applications
  • Stainless steel covers
  • Hot Wafer/Boat Sensor