ML2-x25
Features & Benefits
- The MacLite Junior Series 2-Stage transfer machine transfers 25-each Silicon Wafers between one 25-slot Cassette and one 25-slot process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon and metal boats.
- Fast & Smooth automatic transfer featuring ramped speeds. A 25-wafer transfer in less than 45 seconds.
- Operator interface is with a 12 key keypad with a 4 line LCD display.
- Stage shifts left and right for easy loading and unloading of carriers and boats.
- MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
- Clean operation introduces less than 1.5 particles greater than .23 micron diameter, per wafers per transfer.
- Single Board PC controlled.
- Sensors detect wafers and cassette or process carrier presence for safety.
- Flat/Notch alignment is maintained during transfer.
- Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
- Pressure sensors are used on the lift system and platform to prevent both personnel and wafer damage during transfer.
- All exposed aluminum parts are Anodized for corrosion protection.
- Covers are powder-coated aircraft grade aluminum.
- All bearings are clean room rated.
Options
- Vespel package for high temperature applications
- Stainless steel covers.
- Hot Wafer/Boat Sensor
- Light Tower
- Uptime will exceed 99.95%.
- MTBF (mean time between failure): 2,500 hours
- MTBA (mean time between assist): 1,000 hours
- MTTR (mean time to repair): 1 hour