Features & Benefits

  • The MacLite Junior Series 2-Stage transfer machine transfers 25-each Silicon Wafers between one 25-slot Cassette and one 25-slot process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon and metal boats. 
  • Fast & Smooth automatic transfer featuring ramped speeds. A 25-wafer transfer in less than 45 seconds.
  • Operator interface is with a 12 key keypad with a 4 line LCD display. 
  • Stage shifts left and right for easy loading and unloading of carriers and boats.
  • MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.  
  • Clean operation introduces less than 1.5 particles greater than .23 micron diameter, per wafers per transfer.
  • Single Board PC controlled.
  • Sensors detect wafers and cassette or process carrier presence for safety.
  • Flat/Notch alignment is maintained during transfer.
  • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
  • Pressure sensors are used on the lift system and platform to prevent both personnel and wafer damage during transfer.
  • All exposed aluminum parts are Anodized for corrosion protection.
  • Covers are powder-coated aircraft grade aluminum.
  • All bearings are clean room rated.


  • Vespel package for high temperature applications
  • Stainless steel covers.
  • Hot Wafer/Boat Sensor
  • Light Tower
  • Uptime will exceed 99.95%.
    • MTBF (mean time between failure): 2,500 hours
    • MTBA (mean time between assist): 1,000 hours
    • MTTR (mean time to repair): 1 hour