PCBx00

Features & Benefits

Transfers 24 to 26 each silicon wafers between one standard pitch plastic cassette and one non-standard pitch process boat in a contact back-to-back configuration.
The machine may be configured to accommodate a large diversity of Plastic, Teflon®, metal, Quartz,
Silicon Carbide and Polysilicon carriers.
Machine interface is a 12 key pad with a 4 line LCD Display.
Designed to limit particle contamination by using lead screw drive and stepper motor, “clean room grade” rails and bearings and electric boat sensors.
All aluminum parts are hard black anodized for corrosion resistance.
Electronic through beam sensors are used to detect wafer presence in boats and retainers thus
preventing accidental double loading and scratches.
Lift system uses ramped speed controls for gentle pick-up and landing.
Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.
Retainers default to closed position to prevent dropping wafers in the event of electrostatic discharge, loss of power, or loss of air pressure.
A pause function is provided to stop the lift system at any position to facilitate preventative maintenance and cleaning.
Uptime will exceed 99.25%.
- MTBF (mean time between failure): 100,000 wafers
- MTBA (mean time between assist): 25,000 wafers
- MTTR (mean time to repair): less than 1 hour

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