DFL-x00

Features & Benefits

The DFL (Diffusion Furnace Loader) transfers from Cassettes into process boats onto furnace cantilever.
Safe and easy loading of wafers onto furnace.
User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
Easy “point and click” machine calibration with user interface graphics.
Full function Maintenance Mode allows qualified personnel to independently operate specific modules of the DFL.
Diagnostic and error-logging.
Includes safety sensors and safeguards toprevent wafer and/or machine damage.

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