Features & Benefits

  • The DFL (Diffusion Furnace Loader) transfers from Cassettes into process boats onto furnace cantilever.
  • Safe and easy loading of wafers onto furnace.
  • User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
  • Easy “point and click” machine calibration with user interface graphics.
  • Full function Maintenance Mode allows qualified personnel to independently operate specific modules of the DFL.
  • Diagnostic and error-logging.
  • Includes safety sensors and safeguards toprevent wafer and/or machine damage.


  • Solar Cell Package
  • OCR
  • ASYST/SMIF Pod Opener Integration 
  • Mass Transfer Machine Integration