Features & Benefits
- The DFL (Diffusion Furnace Loader) transfers from Cassettes into process boats onto furnace cantilever.
- Safe and easy loading of wafers onto furnace.
- User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
- Easy “point and click” machine calibration with user interface graphics.
- Full function Maintenance Mode allows qualified personnel to independently operate specific modules of the DFL.
- Diagnostic and error-logging.
- Includes safety sensors and safeguards toprevent wafer and/or machine damage.
- Solar Cell Package
- ASYST/SMIF Pod Opener Integration
- Mass Transfer Machine Integration