PLU-x00

Features & Benefits

• The Programmable Wafer Sampler (PWS) machine transfers wafers between a 25-slot cassette and a self-centering chuck.
• User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
• Transfers may be accomplished through keypad commands and may be programmed for specific, customized sequences.
• The Operator menu allows wafer sorting by one of six methods:1.) Manual 2.) Series 3.) Interval 4.) Random 5.) Load6.) Unload
• The Technician menu (R & M) enables rapidmachine diagnostics and testing.
• Wafers are vacuum sensed during robotic transferto inhibit accidental damage.
• The machine has a small footprint and is exhaustported for clean room operation.
• Machine construction is from Mactronix standardanticorrosion package (all aluminum parts areblack hard anodized).
• Uptime will exceed 99.25%.• Mean time between failure (MTBF): 2,500 hours • Mean time between assist (MTBA): 1,000 hours • Mean time to repair (MTTR): 1 hour

Options

• O.C.R. system for automatic optical character reading
• R.S. 232 communications link with host computer • Custom software packages and SECS II com.
• • Picture within Picture option available
• • Bright light source
• Printer for recording defect data • Bar code reading