R33-300


Standard Features
- A modular, expandable wafer handler in a Class 1 Mini-Environment
- Can incorporate 2 or more FOUP, FOSB or SMIF pods and standard cassette stations
- Safe clean edge grip end effector on Mactronix 3-axis robot arm for fast, smooth sorting and transfer functions
- Touch-screen, easy to use interface
- Includes notch-finding for accurate wafer orientation
- Single point low impedance grounding
- Anodized aluminum frame
- Powder coat epoxy covers
- Small footprint
Specifications
- Throughput > 250 wafer/hr
- Uptime > 99.5%
- MTTA, 1 to 2 minutes
- MTTR < 1 hour
- MTTF > 2500 hours
Optional Features
- Full GEM/SECS interface
- Optional Earthquake Tie Down Points
- OCR reader System
- Anti-static bar under HEPA filter
- Mini-environment closure constructed with anti-static materials
- Barcode Tag Reader
- Stainless Steel Covers