AN16-x00

Features and Benefits

• The Automatic Notch Finder AN16, automatically aligns wafer notches to one of the 16 preselected positions.
• Cassette orientation is specific so that the cassette fits in one direction only. Sensors detect proper cassette position for wafer safety.
• Fast & Smooth. Notch finding is automatic once the cassette is placed on the notch finder.
• The patterned side of the wafers never touch the carrier during rotation.
• No special carrier required, the AN16 can be designed and built to accept your existing cassette.
• Auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
• All exposed aluminum parts are hard Black Anodized.
• Uptime will exceed 99.95%.
  • MTBF (mean time between failure): 2,500 hours 
  • MTBA (mean time between assist): 1,000 hours 
  • MTTR (mean time to repair): 1 hour