AWM-500

Features and Benefits
- Fully Selectable Macro and Micro Inspection
- Gimble controlled Tilt and Rotate front side macro inspection
- Edge Grip Flip for unobstructed view backside macro inspect
- Touch screen operator interface with virtual Instrumentation
- Wafers Vacuum held during inspection
- Notch Alignment Selectable
- Wafer mapper/cross slot detection system
- Flexible bright light power point with Bright Light inspection available (optional)
- Meets FM4910 requirements
- Automatic wafer requirements
- Automatic wafer return to cassette upon completion of inspection
- Ergonomic Load to Meet SEMI S8 requirements
- Exchange arm load to microscope to amcimize throughput
Facility Requirements
110 V.A.C. 50/60 HZ, Single Phase, 3 amps
Grounding: Single point, low impedance
Grounding post provided
Exhaust: 5.0 CFM max, non-process
Dimensions: (4″, 5″, 6″): 23.5″ (59.7cm) (W), 21″ (53.4cm) (D), 15″ (38.1cm) (H)
Warranty: One year parts and labor