AWM-500

Features and Benefits

• Fully Selectable Macro and Micro Inspection
• Gimble controlled Tilt and Rotate front side macro inspection
• Edge Grip Flip for unobstructed view backside macro inspect
• Touch screen operator interface with virtual Instrumentation
• Wafers Vacuum held during inspection
• Notch Alignment Selectable
• Wafer mapper/cross slot detection system
• Flexible bright light power point with Bright Light inspection available (optional)
• Meets FM4910 requirements
• Automatic wafer requirements
• Automatic wafer return to cassette upon completion of inspection
• Ergonomic Load to Meet SEMI S8 requirements
• Exchange arm load to microscope to amcimize throughput

Facility Requirements

110 V.A.C. 50/60 HZ, Single Phase, 3 amps

Grounding: Single point, low impedance

Grounding post provided

Exhaust: 5.0 CFM max, non-process

Dimensions: (4″, 5″, 6″): 23.5″ (59.7cm) (W), 21″ (53.4cm) (D), 15″ (38.1cm) (H)

Warranty: One year parts and labor