Features & Benefits

  • The Programmable Wafer Sampler (PWS) machine transfers wafers between a 25-slot cassette and a self-centering chuck.
  • User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
  • Transfers may be accomplished through keypad commands and may be programmed for specific, customized sequences.
  • The Operator menu allows wafer sorting by one of six methods:1.) Manual 2.) Series 3.) Interval 4.) Random 5.) Load6.) Unload
  • The Technician menu (R & M) enables rapidmachine diagnostics and testing.
  • Wafers are vacuum sensed during robotic transferto inhibit accidental damage.
  • The machine has a small footprint and is exhaustported for clean room operation.
  • Machine construction is from Mactronix standardanticorrosion package (all aluminum parts areblack hard anodized).
  • Uptime will exceed 99.25%.• Mean time between failure (MTBF): 2,500 hours • Mean time between assist (MTBA): 1,000 hours • Mean time to repair (MTTR): 1 hour


  • O.C.R. system for automatic optical character reading
  • R.S. 232 communications link with host computer • Custom software packages and SECS II com.
  • • Picture within Picture option available
  • • Bright light source
  • Printer for recording defect data
  • Bar code reading