WLO-x00

Features & Benefits

Mactronix Wafer Lifter Automatic (WLO), automatically aligns wafer flats followed by successive raising of the wafers on an incline.
Cross-slot detection and wafer mapping.
Capable of automatic indexing for reading wafers with two scribes.
The main function is to read scribes on the wafers, along the flat.
After all lot reading is done, it can report to the fab host via RS232.
The machine may be configured to accommodate a large diversity of Plastic, Teflon® carriers.
With the push of a button, the machine raises wafers automatically for individual wafer identification and edge inspection.
Both flat finding and wafer lifting is switch selectable.
Once flat finding is selected the flat finding operation is automatic with no additional operator input other than carrier placement upon the machine.
By operator selection, the wafers may be raised for inspection and lowered at any time after the flat finding operation.
As a convenience, the foot print and weight of the WLO is small enough to be placed near any work environment.
Carrier sensors located in the platform prevent the machine from operating if the required carriers are not present.
Uptime will exceed 99.25%.
- MTBF (mean time between failure): 2,500 hours
- MTBA (mean time between assist): 1,000 hours
- MTTR (mean time to repair): less than 1 hour

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