EV1-xx0

Features & Benefits

The Automatic Wafer Sorter (EV1) machine transfers wafers between two 25-slot cassettes stacked vertically. Depending on sort routine selected, one cassette may be swapped out for another within the same sort operation.
User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
Transfers may be accomplished through keypadcommands and may be programmed for specific,customized sequences.
The Operator menu allows wafer sorting and combiningby one of two methods:

1.) Manual

2.) Preprogrammed Sort Routines

O.C.R. system for automatic optical character reading
The Technician menu enables rapid machine diagnostics and testing.
Wafers are memory mapped and monitored while in the cassettes and are vacuum sensed and monitored during robotic transfers to inhibit accidental damage.
When wafers need to be specifically orientated in a cassette, optical flat finding is by one of four programmed positions.
The machine has a small footprint and is exhaust ported for clean room operation.
Machine construction is from Mactronix standard anticorrosion package (all aluminum parts are black hard anodized).
Class 1 and Class 10 clean room rated.
Uptime will exceed 99.25%.
- Mean time between failure (MTBF): 2,500 ours
- Mean time between assist (MTBA): 1,000 hours
- Mean time to repair (MTTR): 1 hour

Options