Features & Benefits

  • The Automatic Wafer Sorter (EV1) machine transfers wafers between two 25-slot cassettes stacked vertically. Depending on sort routine selected, one cassette may be swapped out for another within the same sort operation.
  • User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
  • Transfers may be accomplished through keypadcommands and may be programmed for specific,customized sequences.
  • The Operator menu allows wafer sorting and combiningby one of two methods:

1.) Manual

2.) Preprogrammed Sort Routines

  • O.C.R. system for automatic optical character reading
  • The Technician menu enables rapid machine diagnostics and testing.
  • Wafers are memory mapped and monitored while in the cassettes and are vacuum sensed and monitored during robotic transfers to inhibit accidental damage.
  • When wafers need to be specifically orientated in a cassette, optical flat finding is by one of four programmed positions.
  • The machine has a small footprint and is exhaust ported for clean room operation.
  • Machine construction is from Mactronix standard anticorrosion package (all aluminum parts are black hard anodized).
  • Class 1 and Class 10 clean room rated.
  • Uptime will exceed 99.25%.
    • Mean time between failure (MTBF): 2,500 ours
    • Mean time between assist (MTBA): 1,000 hours
    • Mean time to repair (MTTR): 1 hour


  • Tilt rotation with joystick, for 1x visual inspection
  • Bar code reading
  • R.S. 232 communications link with host computer
  • Custom software packages and SECS II com.
  • Picture within Picture option available